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Ultra-wide bandgap (UWBG) Al0.65Ga0.35N channel high electron mobility transistors (HEMTs) were deposited using a close-coupled showerhead metal-organic chemical vapor deposition reactor on AlN-on-sapphire templates to investigate the effect of transport properties of the two-dimensional electron gas (2DEG) on the epitaxial structure design. The impact of various scattering phenomena on AlGaN channel HEMTs was analyzed with respect to the channel, buffer, and AlN interlayer design, revealing that the alloy disorder and ionized impurity scattering mechanisms were predominant, limiting the mobility of 2DEG up to 180 cm2/Vs for a sheet charge density of 1.1 × 1013 cm−2. A surface roughness of <1 nm (2 μm × 2 μm atomic force microscopy scan) was achieved for the epitaxial structures demonstrating superior crystalline quality. The fabricated HEMT device showed state-of-the-art contact resistivity (ρc = 8.35 × 10^−6 Ω · cm2), low leakage current (<10^−6 A/mm), high ION/IOFF ratio (>10^5), a breakdown voltage of 2.55 kV, and a Baliga's figure of merit of 260 MW/cm2. This study demonstrates the optimization of the structural design of UWBG AlGaN channel HEMTs and its effect on transport properties to obtain state-of-the-art device performance. 

Thin Si-doped Al-rich (xAl > 0.85) regrown Al(Ga)N layers were deposited on AlN on sapphire template using metal-organic chemical vapor deposition (MOCVD) techniques. The optimization of the deposition conditions, such as temperature (1150 °C), V/III ratio (750), deposition rate (0.7 Å/s), and Si concentration (6 × 10^19/cm3), resulted in a high charge carrier concentration (> 10^15 cm−3) in the Si-doped Al-rich Al(Ga)N films. A pulsed deposition condition with pulsed triethylgallium and a continuous flow of trimethylaluminum and ammonia was employed to achieve a controllable Al composition xAl > 0.95 and to prevent unintended Ga incorporation in the AlGaN material deposited using the close-coupled showerhead reactor. Also, the effect of unintentional Si incorporation on free charge carrier concentration at the regrowth interface was studied by varying the thickness of the regrown Al(Ga)N layer from 65 to < 300 nm. A maximum charge carrier concentration of 4.8 × 10^16 and 7.5 × 10^15/cm3 was achieved for Al0.97Ga0.03N and AlN films with thickness <300 nm compared to previously reported n-Al(Ga)N films with thickness ≥400 nm deposited using MOCVD technique.